Silicon-based MEMS fabrication techniques and standardization

The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of mechanics and electronics. MEMS shows broad potential applications in many fields including aerospace, automobile and biomedicine. Other than pure minimization, MEMS emphasizes the batch fabrication of integrated microsystems consist of micro-components, micro-sensors, micro-actuators, signal processing and controlling circuits. Silicon-based MEMS is a development of IC technique. It has become the mainstream of MEMS fabrication techniques due to its advantages of batch-fabrication capability, low cost and facilitated ability to be integrated with IC.